Nano scale tilt measurement using a polarizing phase shifting cyclic interferometer. (December 2019)

• Record Type: Journal Article
• Authors: Pretheesh Kumar, V.C.; Ganesan, A.R.
• Is Part Of: Optics & laser technology. Volume 120(2019)
• Publication Date: 2019-12
• Subjects: Cyclic interferometer -- Polarization phase shifting -- Nano tilt measurement; Optics -- Periodicals; Lasers -- Periodicals; Electronic journals; 621.366
• DOI: 10.1016/j.optlastec.2019.105691
• Languages: English
• ISSNs: 0030-3992

Abstract

Abstract: This paper presents an improved method of high precision tilt measurement using a phase shifting cyclic interferometer. Tilt measurement with a cyclic interferometer is a highly stable and reliable experimental technique and tilts as low as 5 μrad has been reported using the same. Here we employ Polarizing Phase Shifting Interferometry (PPSI) as well as multiple reflections for improving the sensitivity. Using a combination of these two techniques tilts as low as 500 nrad has been measured.