Improved transfer process for fabrication of cantilever with precise air-gap formation. (20th February 2017)

• Record Type: Journal Article
• Authors: Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi
• Is Part Of: Japanese journal of applied physics. Volume 56:Number 5(2017)Supplement 2
• Publication Date: 2017-02-20
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.56.05EB01
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: In this paper, an improved transfer process to fabricate a cantilever structure with a precise air gap is reported. For this fabrication, a planar imprinting method was used and the drying conditions of the cantilever precursor ink were controlled. The air gap between the cantilevered top and bottom electrodes was formed with an estimated error of less than 3%. An operational force gauge with a changeable capacitance was obtained by applying a force to the cantilevered top electrode. This process can facilitate the eco-friendly fabrication of micro-devices with three-dimensional structures.