Electrode structure of a compact microwave driven capacitively coupled atomic beam source. (9th November 2017)

• Record Type: Journal Article
• Authors: Shimabukuro, Yuji; Takahashi, Hidenori; Wada, Motoi
• Is Part Of: Japanese journal of applied physics. Volume 57:Number 1(2018)Supplement 1
• Publication Date: 2017-11-09
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.57.01AA02
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: A compact magnetic field free atomic beam source was designed, assembled and tested the performance to produce hydrogen and nitrogen atoms. A forced air-cooled solid-state microwave power supply at 2.45 GHz frequency drives the source up to 100 W through a coaxial transmission cable coupled to a triple stub tuner for realizing a proper matching condition to the discharge load. The discharge structure of the source affected the range of operation pressure, and the pressure was reduced by four orders of magnitude through improving the electrode geometry to enhance the local electric field intensity. Optical emission spectra of the produced plasmas indicate production of hydrogen and nitrogen atoms, while the flux intensity of excited nitrogen atoms monitored by a surface ionization type detector showed the signal level close to a source developed for molecular beam epitaxy applications with 500 W RF power.