One-batch transfer process for the additive manufacturing of a cantilever with a weight. (26th April 2017)

• Record Type: Journal Article
• Authors: Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi
• Is Part Of: Japanese journal of applied physics. Volume 56:Number 6(2017)Supplement 1
• Publication Date: 2017-04-26
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.56.06GN03
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: An improved transferring process that can be used to additively fabricate a cantilever with a weight is reported. By using a poly(dimethylsiloxane) template with a cavity relief structure for the weight formation, an increase in the number of process steps was not required. A capacitive acceleration sensor was successfully manufactured using the described process. Enhanced responsiveness of the sensor was clearly shown to result from the effect of the weight. The one-batch transfer process has the potential to significantly simplify the manufacturing process of highly responsive hollow structures and could be applied in the fabrication of various microelectromechanical system sensors.