Cite
HARVARD Citation
Teo, A. et al. (n.d.). An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer. Journal of micromechanics and microengineering. p. . [Online].
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Teo, A. et al. (n.d.). An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer. Journal of micromechanics and microengineering. p. . [Online].