Cite
HARVARD Citation
Bruneau, B. et al. (n.d.). Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms. Plasma sources science & technology. p. . [Online].
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Bruneau, B. et al. (n.d.). Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms. Plasma sources science & technology. p. . [Online].