Bridging the gap between global models and full fluid models: a fast 1D semi-analytical fluid model for electronegative plasmas. (14th June 2016)

• Record Type: Journal Article
• Authors: Hurlbatt, A; O'Connell, D; Gans, T
• Is Part Of: Plasma sources science & technology. Volume 25:Number 4(2016:Aug.)
• Publication Date: 2016-06-14
• Subjects: plasma modelling -- electronegative plasma -- semi-analytical -- one dimensional -- fluid model -- capacitively coupled discharge; Plasma (Ionized gases) -- Periodicals; 530.44
• DOI: 10.1088/0963-0252/25/4/045011
• Languages: English
• ISSNs: 0963-0252

Abstract

Abstract: Analytical and numerical models allow investigation of complicated discharge phenomena and the interplay that makes plasmas such a complex environment. Global models are quick to implement and can have almost negligible computation cost, but provide only bulk or spatially averaged values. Full fluid models take longer to develop, and can take days to solve, but provide accurate spatio-temporal profiles of the whole plasma. The work presented here details a different type of model, analytically similar to fluid models, but computationally closer to a global model, and able to give spatially resolved solutions for the challenging environment of electronegative plasmas. Included are non-isothermal electrons, gas heating, and coupled neutral dynamics. Solutions are reached in seconds to minutes, and spatial profiles are given for densities, fluxes, and temperatures. This allows the semi-analytical model to fill the gap that exists between global and full fluid models, extending the tools available to researchers. The semi-analytical model can perform broad parameter sweeps that are not practical with more computationally expensive models, as well as exposing non-trivial trends that global models cannot capture. Examples are given for a low pressure oxygen CCP. Excellent agreement is shown with a full fluid model, and comparisons are drawn with the corresponding global model.