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HARVARD Citation
Yang, W. et al. (n.d.). A novel approach to the analysis of squeezed-film air damping in microelectromechanical systems. Journal of micromechanics and microengineering. p. . [Online].
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Yang, W. et al. (n.d.). A novel approach to the analysis of squeezed-film air damping in microelectromechanical systems. Journal of micromechanics and microengineering. p. . [Online].