Cite
HARVARD Citation
Liu, J. et al. (n.d.). Fabrication of a flexible polyimide-based electrostatically actuated MEMS relay. Journal of micromechanics and microengineering. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Liu, J. et al. (n.d.). Fabrication of a flexible polyimide-based electrostatically actuated MEMS relay. Journal of micromechanics and microengineering. p. . [Online].