A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect. (5th July 2018)

• Record Type: Journal Article
• Authors: Liu, Xinxin; Wang, Yixiang; Le, Xianhao; Xu, Zhonggui; Wu, Changju; Xie, Jin
• Is Part Of: Journal of micromechanics and microengineering. Volume 28:Number 10(2018:Oct.)
• Publication Date: 2018-07-05
• Subjects: DETF resonator -- piezoelectric -- dual driving -- quality factor -- multimode suppress; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aacd2e
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: A high quality factor ( Q ) piezoelectric double-ended tuning fork (DETF) resonator with dual-driving capacity based on aluminum nitride (AlN) is reported in this paper. This novel dual-driving electrode design in a piezoelectric resonator can not only enhance the symmetry in the in-plane mode but also weaken the crosstalk from the out-of-plane mode. By trapping the vibration energy in the wanted mode, the dual-driving DETF improves Q to 8173 compared to the conventional single-driving DETF with a Q of 3632. Through this dual-driving strategy, the DETF is excited to vibrate more closely with the in-plane resonant mode, which has less energy loss and balanced stress distribution. In addition, the dual-driving method also increases the signal intensity at the symmetric mode while reducing the signal intensity at the out-of-plane mode. This suppressed multimode effect contributes to a high performance of the DETF resonators and shows good potential in piezoelectric resonant sensors with high resolution.