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HARVARD Citation
Kim, H. et al. (n.d.). 2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor. Plasma sources science & technology. p. . [Online].
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Kim, H. et al. (n.d.). 2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor. Plasma sources science & technology. p. . [Online].