Cite
HARVARD Citation
Lebedev, V. et al. (n.d.). Nanodiamond resonators fabricated on 8″ Si substrates using adhesive wafer bonding. Journal of micromechanics and microengineering. p. . [Online].
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Lebedev, V. et al. (n.d.). Nanodiamond resonators fabricated on 8″ Si substrates using adhesive wafer bonding. Journal of micromechanics and microengineering. p. . [Online].