Cite
HARVARD Citation
Lee, J. et al. (n.d.). 3C-SiC microdisk mechanical resonators with multimode resonances at radio frequencies. Journal of micromechanics and microengineering. p. . [Online].
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Lee, J. et al. (n.d.). 3C-SiC microdisk mechanical resonators with multimode resonances at radio frequencies. Journal of micromechanics and microengineering. p. . [Online].