Electrical and mechanical performance difference on piezoelectric segmentation in a passive MEMS DC current sensor applicable to two-wire DC appliances. (18th November 2016)

• Record Type: Journal Article
• Authors: Yang, Xu; Fu, Yupeng; Wang, Dong F
• Is Part Of: Measurement science & technology. Volume 28:Number 1(2017:Jan.)
• Publication Date: 2016-11-18
• Subjects: MEMS DC current sensor -- performance difference -- FEM analysis -- power and separator free; Physical measurements -- Periodicals; Scientific apparatus and instruments -- Periodicals; Equipment and Supplies -- Periodicals; Science -- instrumentation -- Periodicals; Technology -- instrumentation -- Periodicals; Mesures physiques -- Périodiques; Physical measurements; Scientific apparatus and instruments; Periodicals; 502.87
• DOI: 10.1088/0957-0233/28/1/015101
• Languages: English
• ISSNs: 0957-0233

Abstract

Abstract: As society develops in intelligence, DC is being widely used in all kinds of field in modern life, which means that a sensitive and convenient DC sensor is necessary to monitor it. Compared with other kinds of current sensor, the proposed passive MEMS DC current sensor has several significant features: power-free passive sensing, small size and low cost. In this work, the performance difference of a cantilever-based bending MEMS DC current sensor among three segmentation PZT plates was first experimentally discovered. The distribution difference of X -dir ( X -direction) stress along the Y axis is confirmed through FEM analysis. An optimized structure with two slots at the root of the cantilever has been proposed to minimize the difference of average X -dir stress on an area attached to three PZT plates. A nearly linear relationship between the output voltage V output and the AC current has been obtained through both theoretical calculation and experimental verification. The sensitivity of the developed MEMS DC current sensor is 40–25 mV A −1 in the current range of 0–400 mA. It is found that there is a good consistency among the calculation, experiment and simulation results.