A simple process to achieve microchannels geometries able to produce hydrodynamic cavitation. (2nd March 2017)

• Record Type: Journal Article
• Authors: Qiu, X; Cherief, W; Colombet, D; Ayela, F
• Is Part Of: Journal of micromechanics and microengineering. Volume 27:Number 4(2017:Apr.)
• Publication Date: 2017-03-02
• Subjects: cavitation -- microchannel -- two phase flows; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aa5fa5
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: We present a simple process to perform microchannels in which cavitating two phase flows are easily producible. Up to now, hydrodynamic cavitation 'on a chip' was reached with small flow rates inside microchannels whose micromachining had involved a deep reactive ion etching (D-RIE). The process we present here does not require a D-RIE reactor, as it is only funded on a wet etching of silicon. It leads to a so-called microstep profile, and large cavitating flow rates become possible together with moderate pressure drops.