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HARVARD Citation
Becker, M. et al. (n.d.). Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges. Plasma sources science & technology. p. . [Online].
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Becker, M. et al. (n.d.). Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges. Plasma sources science & technology. p. . [Online].