Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold. (29th May 2019)

• Record Type: Journal Article
• Authors: Haq, Muhammad Refatul; Kim, Young Kyu; Kim, Jun; Ju, Jonghyun; Kim, Seok-min
• Is Part Of: Journal of micromechanics and microengineering. Volume 29:Number 7(2019:Jul.)
• Publication Date: 2019-05-29
• Subjects: glass micromixer -- furan imprinting -- vitreous carbon -- carbonization process -- glass molding process; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/ab1f99
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: A glass microfluidic device with superior chemical and mechanical resistance was fabricated using a cost-effective glass molding process with a vitreous carbon (VC) mold, which was prepared by the carbonization of a replicated polymer precursor. For the development of microfluidic chips with dense microchannels on a large footprint, a defect-free VC mold is essential. In this study, a furan imprinting process, in which a patterned furan layer was imprinted (cured) on a polished furan plate, was established to minimize warpage and gas bubble defects. In addition, the proposed imprinting process markedly reduced the fabrication time of the furan precursor. For feasibility testing, a glass micromixer with a total channel length of 30.6 cm and footprint of 20 × 20 mm 2 was developed by glass molding with the VC mold and thermal fusion bonding. The fabricated glass-molded micromixer was durable at an internal pressure of ~24 MPa, and there was no swelling when used with toluene for an extended time.