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HARVARD Citation
Shida, K. et al. (n.d.). Depth-resolved analysis of lattice distortions in high-Ge-content SiGe/compositionally graded SiGe films using nanobeam x-ray diffraction. Semiconductor science and technology. p. . [Online].
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Shida, K. et al. (n.d.). Depth-resolved analysis of lattice distortions in high-Ge-content SiGe/compositionally graded SiGe films using nanobeam x-ray diffraction. Semiconductor science and technology. p. . [Online].