A bi-stable vertical magnetic actuator with non-contact latching based on magnetic microlamination technology. (11th July 2018)

• Record Type: Journal Article
• Authors: Li, Yuan; Kim, Minsoo; Allen, Mark G
• Is Part Of: Journal of micromechanics and microengineering. Volume 28:Number 10(2018:Oct.)
• Publication Date: 2018-07-11
• Subjects: bi-stable -- magnetic actuator -- multilayer -- single-mask process -- latching -- microelectromechanical systems; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aacf35
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: We present the design, fabrication and testing of a bi-stable vertical magnetic actuator which exhibits non-contact latching behavior that is enabled by magnetic microlamination technology. The lamination technology translates the structural periodicity (i.e. the multilayers of alternating magnetic and nonmagnetic materials) into magnetic-field-pattern periodicity, which in turn results in multi-stable energy states of the microsystem and leads to the defined latching behavior. A single-mask process is utilized to reduce the fabrication complexity of this actuator. The actuator has bi-stable vertical latching positions 40 μ m-apart and the latching mechanism is solely based on magnetostatic interaction without the need for a mechanical stop. Input energies as low as 0.6 mJ for switching up and 0.02 mJ for switching down are needed to fulfill one full period of the bi-stable actuation. No external energy is needed in the latching positions. The behavior of the actuator is explained in terms of the energy landscape theory. These types of vertical multi-stable actuators could have potential applications as valves in micro-fluidic controls, or as integral parts of micro-mirrors in optical applications.