30.1: Transparent Basic Logic Circuits with ITO‐Stabilized ZnO Thin Film Transistors. (28th November 2018)

• Record Type: Journal Article
• Authors: Xu, Yuming; Wu, Zhaohui; Deng, Sunbin; Qin, Yuning; Zhong, Wei; Chen, Rongsheng; Li, Bin; Wong, Man; Kwok, Hoi Sing
• Is Part Of: Digest of technical papers. Volume 49(2018)Supplement 1
• Page Start: 322
• Page End: 325
• Publication Date: 2018-11-28
• Subjects: ITO-Stabilized ZnO -- Thin Film Transistor(TFT) -- Transparent Basic Logic Circuits; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.12715
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : Transparent basic logic circuits integrated by indium tin oxide(ITO)‐stabilized ZnO thin film transistors(TFTs) are successfully fabricated on glass substrate. ITO‐stabilized ZnO thin films with hybrid‐phase microstructure are employed as active layers in the bottom‐contact top‐gated TFTs. We fabricate 13‐stages ring oscillator (RO) with diode‐load and pseudo‐CMOS inverter respectively in order to tell the difference between those two schemes. The pseudo‐CMOS RO exhibits 7V voltage swing and 42kHz oscillation frequency while the diode‐load RO exhibiting 3.3V and 71kHz under the same supply voltage of 20V. Meanwhile, basic digital circuits like NOR gates and D flip flops with pseudo‐CMOS scheme are also fabricated and they are logically correct. Those logic gates exhibit a typical high level of 4.3V, low level of 200mV and maximum operating frequency of nearly 10kHz under the 10V supply voltage. The transmittance of the chip is 80% to 90% in a 380‐nm to 800‐nm wavelength.