Cite
HARVARD Citation
Jang, J. et al. (n.d.). MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate. Journal of micromechanics and microengineering. p. . [Online].
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Jang, J. et al. (n.d.). MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate. Journal of micromechanics and microengineering. p. . [Online].