Development of atmospheric pressure glow discharge plasma assisted CVD system for the deposition of SiOx coatings. (18th June 2019)

Record Type:: Journal Article
Title:: Development of atmospheric pressure glow discharge plasma assisted CVD system for the deposition of SiOx coatings. (18th June 2019)
Main Title:: Development of atmospheric pressure glow discharge plasma assisted CVD system for the deposition of SiOx coatings
Authors:: Pardeshi, H.
Patil, P.P.
Bange, J.
Abstract:
Is Part Of:: Journal of instrumentation. Volume 14:Number 6(2019)
Journal:: Journal of instrumentation
Issue:: Volume 14:Number 6(2019)
Issue Display:: Volume 14, Issue 6 (2019)
Year:: 2019
Volume:: 14
Issue:: 6
Issue Sort Value:: 2019-0014-0006-0000
Page Start:: P06026
Page End:: P06026
Publication Date:: 2019-06-18
Subjects:: Scientific apparatus and instruments -- Periodicals
502.84
Journal URLs:: http://iopscience.iop.org/1748-0221 ↗
http://ioppublishing.org/ ↗
DOI:: 10.1088/1748-0221/14/06/P06026 ↗
Languages:: English
ISSNs:: 1748-0221
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 11128.xml