Cite
HARVARD Citation
Yubao, Z. et al. (2019). Effect of bias voltage on microstructure and properties of magnetron sputtering TaN coating. IOP conference series. 267 (4), p. . [Online].
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Yubao, Z. et al. (2019). Effect of bias voltage on microstructure and properties of magnetron sputtering TaN coating. IOP conference series. 267 (4), p. . [Online].