Nucleation site in CVD graphene growth investigated by radiation-mode optical microscopy. (5th April 2017)

• Record Type: Journal Article
• Authors: Taira, Takanobu; Obata, Seiji; Saiki, Koichiro
• Is Part Of: Applied physics express. Volume 10:Number 5(2017)
• Publication Date: 2017-04-05
• Subjects: Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.7567/APEX.10.055502
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: We investigate the graphene nucleation site in real space using radiation-mode optical microscopy (Rad-OM), which we have developed for the real-time observation of the graphene growth in chemical vapor deposition (CVD) conditions. We found the bright spot in the Rad-OM image worked as a nucleation site through continuous observation of a Cu substrate from pretreatment to graphene growth. The bright spot, considered as a C impurity, was effectively removed by Ar bombardment, which significantly reduced the nucleation density. The present result directly elucidates the role of C impurities and provides a means to grow single-crystalline and large-area graphene via CVD.