Cite
HARVARD Citation
Shin, I. et al. (2018). Epitaxial growth of single-crystalline AlN layer on Si(111) by DC magnetron sputtering at room temperature. Japanese journal of applied physics. p. . [Online].
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Shin, I. et al. (2018). Epitaxial growth of single-crystalline AlN layer on Si(111) by DC magnetron sputtering at room temperature. Japanese journal of applied physics. p. . [Online].