Cite
HARVARD Citation
Firek, P. et al. (2019). Influence of AlN etching process on MISFET structures. Microelectronics international. 36 (3), pp. 109-113. [Online].
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Firek, P. et al. (2019). Influence of AlN etching process on MISFET structures. Microelectronics international. 36 (3), pp. 109-113. [Online].