Cite
HARVARD Citation
Yang, L. et al. (n.d.). Effect of organic amine alkali and inorganic alkali on benzotriazole removal during post Cu-CMP cleaning *Project supported by the Major National Science and Technology Special Projects (No. 2016ZX02301003-004-007), the Natural Science Foundation, China (No. 61704046), and the Hebei Natural Science Foundation Project (No. F2018202174).. Journal of semiconductors. p. . [Online].