Mechanically metastable structures generated by single pulse laser-induced periodic surface structures (LIPSS) in the photoresist SU8. (22nd May 2018)

• Record Type: Journal Article
• Authors: Reinhardt, Hendrik; Peschke, Patrick; Riedel, René; Hampp, Norbert
• Is Part Of: Nanotechnology. Volume 29:Number 30(2018)
• Publication Date: 2018-05-22
• Subjects: laser-induced periodic surface structures -- LIPSS -- photoresist SU8 -- mechanically metastable surface; Nanotechnology -- Periodicals; Nanotechnology -- Periodicals; Nanotechnology; Publications périodiques; Nanotechnologies; Periodicals; 620.5
• DOI: 10.1088/1361-6528/aac378
• Languages: English
• ISSNs: 0957-4484

Abstract

Abstract: Laser-induced periodic surface structures (LIPSS) with a periodicity of 351 nm are generated in the negative photoresist SU8 by single nanosecond laser pulse impact. Friction scans indicate the periodic pattern to comprise alternating regions of crosslinked and non-crosslinked SU8. Intriguingly, even minor mechanical stimuli in the order of nanonewtons cause the unfolding or rather the deletion of the characteristic periodic pattern similarly to the release of a pre-loaded spring. This feature combined with high resilience to heat and photon irradiation makes SU8-LIPSS attractive for applications such as mechanical stress monitors, self-destructing memory and passive micro actuators.