Ion Micro Beam, promising methods for interdisciplinary research. (3rd May 2016)

• Record Type: Journal Article
• Authors: Cutroneo, M.; Havranek, V.; Torrisi, L.; Svecova, B.
• Is Part Of: Journal of instrumentation. Volume 11:Number 5(2016:May)
• Page Start: C05001
• Page End: C05001
• Publication Date: 2016-05-03
• Subjects: Accelerator Applications -- Accelerator Subsystems and Technologies -- Ion sources (positive ions, negative ions, electron cyclotron resonance (ECR), electron beam (EBIS)); Scientific apparatus and instruments -- Periodicals; 502.84
• DOI: 10.1088/1748-0221/11/05/C05001
• Languages: English
• ISSNs: 1748-0221

Abstract

Abstract: An increasing attractiveness of top-down nanotechnology using nuclear microprobe techniques have been gathered to the micro and nano patterning process for polymers. This paper presents the research activity on innovative promising techniques able to produce three- dimensional (3D) micro-structures in polymeric resists as well as to obtain images of fabricated nanostructures at Tandetron Laboratory (LT) of the Nuclear Physics Institute in Rez (Czech Republic). The Proton Beam Writing (PBW) technique was used to irradiate PMMA resist with energy of MeVs protons. The fabricated patterns were developed in chemical bath using different etching rates. An overview of micro-scale structures have been fabricated selecting the beam, the energy, the fluence and the exposition time. The produced structures were investigated by different analysis techniques among which Scanning Transmission Ion Microscopy (STIM). The characterizations of the fabricated microtunnels are presented and discussed.