Structural, optical and XPS study of thermal evaporated In2O3 thin films. (14th August 2017)

• Record Type: Journal Article
• Authors: Reddy, I Neelakanta; Venkata Reddy, Ch; Cho, Migyung; Shim, Jaesool; Kim, Dongseob
• Is Part Of: Materials research express. Volume 4:Number 8(2017)
• Publication Date: 2017-08-14
• Subjects: evaporation -- XPS -- In2O3 -- thin films -- PL; Materials science -- Research -- Periodicals; Materials science -- Periodicals; 620.11
• DOI: 10.1088/2053-1591/aa7f59
• Languages: English
• ISSNs: 2053-1591

Abstract

Abstract: The nanostructured In2 O3 thin films were deposited on Si n-type (1 0 0) substrates by reactive thermal evaporation. The structural, morphological, and oxidation states of the films were investigated using x-ray diffraction, scanning electron microscopy, atomic force microscopy, and x-ray photoelectron spectroscopy. The optical properties of the films were analyzed by UV–vis spectroscopy, Raman spectroscopy, and photoluminescence spectroscopy. The deposited films showed c-In2 O3 crystalline nanostructures with a preferred diffraction peak of (2 2 2). The truncated icosahedron shape's morphology with a transmittance of 85% was observed in the In2 O3 thin films. All the deposited indium oxide films have 3+ oxidation states.