Surface smoothing of indium tin oxide film by laser-induced photochemical etching. (7th November 2017)
- Record Type:
- Journal Article
- Title:
- Surface smoothing of indium tin oxide film by laser-induced photochemical etching. (7th November 2017)
- Main Title:
- Surface smoothing of indium tin oxide film by laser-induced photochemical etching
- Authors:
- Kang, JoonHyun
Kim, Young-Hwan
Kwon, Seok Joon
Park, Joon-Suh
Park, Kyoung Wan
Park, Jae-Gwan
Han, Il Ki - Abstract:
- Abstract: Surface smoothing of indium tin oxide (ITO) film by laser irradiation was demonstrated. The ITO surface was etched by choline radicals, which were activated by laser irradiation at a wavelength of 532 nm. The RMS surface roughness was improved from 5.6 to 4.6 nm after 10 min of laser irradiation. We also showed the changes in the surface morphology of the ITO film with various irradiation powers and times.
- Is Part Of:
- Japanese journal of applied physics. Volume 56:Number 12(2017)
- Journal:
- Japanese journal of applied physics
- Issue:
- Volume 56:Number 12(2017)
- Issue Display:
- Volume 56, Issue 12 (2017)
- Year:
- 2017
- Volume:
- 56
- Issue:
- 12
- Issue Sort Value:
- 2017-0056-0012-0000
- Page Start:
- Page End:
- Publication Date:
- 2017-11-07
- Subjects:
- Physics -- Periodicals
621.05 - Journal URLs:
- http://iopscience.iop.org/1347-4065/ ↗
http://ioppublishing.org/ ↗ - DOI:
- 10.7567/JJAP.56.128003 ↗
- Languages:
- English
- ISSNs:
- 0021-4922
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 11084.xml