Fully additive manufacture of a polymer cantilever with an embedded functional layer. (15th February 2018)

• Record Type: Journal Article
• Authors: Kanazawa, Shusuke; Kusaka, Yasuyuki; Horii, Yoshinori; Ushijima, Hirobumi
• Is Part Of: Japanese journal of applied physics. Volume 57:Number 3(2018)
• Publication Date: 2018-02-15
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.57.030312
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: In this paper, we report on an efficient and unique printing-based process for fabricating a cantilever structure with an embedded functional layer. The process is used to form a micro suspended structure via the one-batch transfer of stacked layers from a dummy substrate. The mechanism of the transfer process is clearly explained by the order of adhesion strengths of all interfaces. As a demonstration, a strain gauge which consisted of a polymer cantilever with an embedded conductive wire was successfully fabricated. It is expected that the proposed process will widely contribute to the efficient manufacture of useful sensors and actuators.