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Development of surface barrier detectors of low leakage current employing argon cold plasma assisted silicon surface cleaning prior to detector fabrication. (20th September 2018)
Record Type:
Journal Article
Title:
Development of surface barrier detectors of low leakage current employing argon cold plasma assisted silicon surface cleaning prior to detector fabrication. (20th September 2018)
Main Title:
Development of surface barrier detectors of low leakage current employing argon cold plasma assisted silicon surface cleaning prior to detector fabrication