Cite
HARVARD Citation
Kechkar, S. et al. (n.d.). Investigation of the electron kinetics in O2 capacitively coupled plasma with the use of a Langmuir probe. Plasma sources science & technology. p. . [Online].
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Kechkar, S. et al. (n.d.). Investigation of the electron kinetics in O2 capacitively coupled plasma with the use of a Langmuir probe. Plasma sources science & technology. p. . [Online].