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HARVARD Citation
Domínguez Bucio, T. et al. (2017). Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. Journal of physics. p. . [Online].
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Domínguez Bucio, T. et al. (2017). Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. Journal of physics. p. . [Online].