Cite
HARVARD Citation
Sun, X. et al. (n.d.). Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control. Journal of micromechanics and microengineering. p. . [Online].
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Sun, X. et al. (n.d.). Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control. Journal of micromechanics and microengineering. p. . [Online].