Peak shape analysis of deep level transient spectra: An alternative to the Arrhenius plot. Issue 10 (12th March 2019)

• Record Type: Journal Article
• Authors: Whiting, Patrick G.; Jones, Kevin S.; Hirschman, Karl D.; Senawiratne, Jayantha; Moll, Johannes; Manley, Robert G.; Couillard, J. Gregory; Kosik Williams, Carlo A.
• Is Part Of: Journal of materials research. Volume 34:Issue 10(2019)
• Page Start: 1654
• Page End: 1668
• Publication Date: 2019-03-12
• Subjects: deep level transient spectroscopy (DLTS), -- ion-implantation, -- Si; Materials -- Research -- Periodicals; 620.1105
• DOI: 10.1557/jmr.2019.70
• Languages: English
• ISSNs: 0884-2914

Abstract

Abstract: Abstract : A new deep level transient spectroscopy (DLTS) technique is described, called half-width at variable intensity analysis. This method utilizes the width and normalized intensity of a DLTS signal to determine the activation energy and capture cross section of the trap that generated the signal via a variable, k O . This constant relates the carrier emission rates giving rise to the differential capacitance signal associated with a given trap at two different temperatures: the temperature at which the maximum differential capacitance is detected, and an arbitrary temperature at which some nonzero differential capacitance signal is detected. The extracted activation energy of the detected trap center is used along with the position of the peak maximum to extract the capture cross section of the trap center.