Cite
HARVARD Citation
Junige, M. et al. (2017). Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO2 substratum. Nanotechnology. p. . [Online].
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Junige, M. et al. (2017). Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO2 substratum. Nanotechnology. p. . [Online].