Inkjet Printing: Inkjet‐Printed and Deep‐UV‐Annealed YAlOx Dielectrics for High‐Performance IGZO Thin‐Film Transistors on Flexible Substrates (Adv. Electron. Mater. 6/2019). (6th June 2019)

• Record Type: Journal Article
• Authors: Bolat, Sami; Fuchs, Peter; Knobelspies, Stefan; Temel, Ozgur; Sevilla, Galo Torres; Gilshtein, Evgeniia; Andres, Christian; Shorubalko, Ivan; Liu, Yujing; Tröster, Gerhard; Tiwari, Ayodhya N.; Romanyuk, Yaroslav E.
• Is Part Of: Advanced Electronic Materials. Volume 5:Number 6(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-06-06
• Subjects: deep UV annealing -- flexible electronics -- inkjet printing -- thin‐film transistors -- YAlOx dielectrics; Materials -- Electric properties -- Periodicals; Materials science -- Periodicals; Magnetic materials -- Periodicals; Electronic apparatus and appliances -- Periodicals; 537
• DOI: 10.1002/aelm.201970031
• Languages: English
• ISSNs: 2199-160X

Abstract

Abstract : Recent developments in inkjet printing have shown it to be a viable method for low‐cost and large‐area coating of oxide materials. In article1800843, S. Bolat et al. report the low‐temperature synthesis of yttrium aluminum oxide (YAlO x ) dielectric layers through a combination of inkjet printing of sol–gel precursors and heat‐assisted deep ultraviolet (DUV) annealing. Using this process, the post‐deposition annealing temperature required is reduced to a level compatible with sensitive polymer substrates.