Cite
HARVARD Citation
Sasaki, M. et al. (2018). Fabrication of 3-stepped spiral trench with smooth sidewall at nano-level to deposit superconducting material for energy storage. International journal of nanotechnology. pp. 858-872. [Online].
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Sasaki, M. et al. (2018). Fabrication of 3-stepped spiral trench with smooth sidewall at nano-level to deposit superconducting material for energy storage. International journal of nanotechnology. pp. 858-872. [Online].