Cite
HARVARD Citation
Zhang, Y. et al. (2018). Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges. Plasma processes and polymers. 15 (3), p. n/a. [Online].
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Zhang, Y. et al. (2018). Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges. Plasma processes and polymers. 15 (3), p. n/a. [Online].