Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency. (1st May 2018)

• Record Type: Journal Article
• Authors: Zhang, Guojun; Ding, Junwen; Xu, Wei; Liu, Yuan; Wang, Renxin; Han, Janjun; Bai, Bing; Xue, Chenyang; Liu, Jun; Zhang, Wendong
• Is Part Of: Mechanical systems and signal processing. Volume 104(2018)
• Page Start: 607
• Page End: 618
• Publication Date: 2018-05-01
• Subjects: MEMS vector hydrophone -- Stress concentration -- High sensitivity -- Low-frequency response; Structural dynamics -- Periodicals; Vibration -- Periodicals; Constructions -- Dynamique -- Périodiques; Vibration -- Périodiques; Structural dynamics; Vibration; Periodicals; 621
• DOI: 10.1016/j.ymssp.2017.11.027
• Languages: English
• ISSNs: 0888-3270

Abstract

Highlights: A novel MEMS vector hydrophone was developed for applying during 20–500 Hz based on piezoresistive effect and fish bionics. Designing stress centralized sensitive micro structure improved the sensitivity of MEMS vector hydrophone greatly. Using multi-parameters optimization in ANSYS15.0 found the optimum solution which resulted the highest sensitivity with the restrictions of bandwidth. MEMS technology was used to fabricate and package the sensing device. Abstract: A micro hydrophone based on piezoresistive effect, "MEMS vector hydrophone" was developed for acoustic detection application. To improve the sensitivity of MEMS vector hydrophone at low frequency, we reported a stress centralized MEMS vector hydrophone (SCVH) mainly used in 20–500 Hz. Stress concentration area was actualized in sensitive unit of hydrophone by silicon micromachining technology. Then piezoresistors were placed in stress concentration area for better mechanical response, thereby obtaining higher sensitivity. Static analysis was done to compare the mechanical response of three different sensitive microstructure: SCVH, conventional micro-silicon four-beam vector hydrophone (CFVH) and Lollipop-shaped vector hydrophone (LVH) respectively. And fluid–structure interaction (FSI) was used to analyze the natural frequency of SCVH for ensuring the measurable bandwidth. Eventually, the calibration experiment in standing wave field was done to test the property of SCVH and verify the accuracy of simulation. The results show that the sensitivity of SCVH has nearly increased by 17.2 dB in contrast to CFVH and 7.6 dB in contrast to LVH during 20–500 Hz.