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On Relation between Porosity of Epitaxial Layer and Quantity of Radiation Defects Generated during Radiation Processing in a Multilayer Structure. (10th July 2016)
Record Type:
Journal Article
Title:
On Relation between Porosity of Epitaxial Layer and Quantity of Radiation Defects Generated during Radiation Processing in a Multilayer Structure. (10th July 2016)
Main Title:
On Relation between Porosity of Epitaxial Layer and Quantity of Radiation Defects Generated during Radiation Processing in a Multilayer Structure
Abstract : We analyzed redistribution of radiation defects in a multilayer structure with porous epitaxial layer. The radiation defects were generated during radiation processing. It has been shown that porosity of epitaxial layer gives a possibility to decrease quantity of radiation defects.