A Novel Manufacturing Technology for RF MEMS Devices on Ceramic Substrates. (23rd November 2010)

• Record Type: Journal Article
• Authors: Schirosi, V.; Del Re, G.; Ferrari, L.; Caliandro, P.; Rizzi, L.; Melone, G.
• Other Names: Siciliano P. Academic Editor.
• Is Part Of: Journal of sensors. Volume 2010(2010)
• Publication Date: 2010-11-23
• Subjects: Detectors -- Periodicals; 681.205
• DOI: 10.1155/2010/625325
• Languages: English
• ISSNs: 1687-725X

Abstract

Abstract : Microelectromechanical systems are often used for their enormous capability and good qualities in T/R modules especially for space modular applications. High isolation and very low insertion loss are guaranteed by their intrinsic working principle. This is a very robust, flexible, and low-cost technology, and it provides high reliability, good reproducibility, and complete fulfillment of technical requirements.