Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing. (14th June 2009)

• Record Type: Journal Article
• Authors: Mayeh, M.; Viegas, J.; Srinivasan, P.; Marques, P.; Santos, J. L.; Johnson, E. G.; Farahi, F.
• Other Names: Riziotis Christos Academic Editor.
• Is Part Of: Journal of sensors. Volume 2009(2009)
• Publication Date: 2009-06-14
• Subjects: Detectors -- Periodicals; 681.205
• DOI: 10.1155/2009/470175
• Languages: English
• ISSNs: 1687-725X

Abstract

Abstract : We present optical sensors based on slotted multimode interference waveguides. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals. Sensors made with this technology are suited to high volume manufacturing.