Micro-Optoelectromechanical Tilt Sensor. (23rd April 2008)

• Record Type: Journal Article
• Authors: Constandinou, Timothy G.; Georgiou, Julius
• Other Names: Matias Ignacio Academic Editor.
• Is Part Of: Journal of sensors. Volume 2008(2008)
• Publication Date: 2008-04-23
• Subjects: Detectors -- Periodicals; 681.205
• DOI: 10.1155/2008/782764
• Languages: English
• ISSNs: 1687-725X

Abstract

Abstract : This paper presents a novel hybrid CMOS/MEMS tilt sensor with a5 ∘ resolution over a300 ∘ range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm× 2.5 mm.