Collective Micro-Optics Technologies for VCSEL Photonic Integration. (10th December 2011)

• Record Type: Journal Article
• Authors: Bardinal, V.; Camps, T.; Reig, B.; Barat, D.; Daran, E.; Doucet, J. B.
• Other Names: Michalzik Rainer Academic Editor.
• Is Part Of: Advances in optical technologies. Volume 2011(2011)
• Publication Date: 2011-12-10
• Subjects: Optoelectronics -- Periodicals; Optoelectronics; Physics; Periodicals; Electronic journals; 621.36
• DOI: 10.1155/2011/609643
• Languages: English
• ISSNs: 1687-6393

Abstract

Abstract : We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.