A 3D fiber probe based on orthogonal micro focal-length collimation and fiber Bragg grating. (31st May 2016)

• Record Type: Journal Article
• Authors: Cui, Jiwen; Li, Junying; Feng, Kunpeng; Tan, Jiubin; Zhang, Jian
• Is Part Of: Measurement science & technology. Volume 27:Number 7(2016:Jul.)
• Publication Date: 2016-05-31
• Subjects: fiber probe -- measurement of micro parts -- micro focal-length collimation -- FBG sensor; Physical measurements -- Periodicals; Scientific apparatus and instruments -- Periodicals; Equipment and Supplies -- Periodicals; Science -- instrumentation -- Periodicals; Technology -- instrumentation -- Periodicals; Mesures physiques -- Périodiques; Physical measurements; Scientific apparatus and instruments; Periodicals; 502.87
• DOI: 10.1088/0957-0233/27/7/074005
• Languages: English
• ISSNs: 0957-0233

Abstract

Abstract: A 3D fiber probe is proposed for the precision measurement of micro parts with high aspect ratios. The probing system consists of two measuring systems: two mutually orthogonal micro focal-length collimation optical paths for the radial tactile probing measurement, and a matched fiber Bragg grating (FBG) pair interrogation system for the axial tactile probing measurement. The fiber probe consists of a fiber stylus and a probe tip, the fiber stylus works as a micro focal-length cylindrical lens, and the FBG inscribed in the fiber stylus works as a measuring FBG. The radial displacement of the probe tip is transformed into the centroid position shift of the two mutually orthogonal micro focal-length collimation optical paths; the axial displacement of the probe tip is transformed into the power ratio change of the matched FBG pair interrogation system. Experimental results indicate that the probe has a radial sensitivity of 71 pixel μ m −1 in both X and Y directions, and an axial sensitivity of 4.9% μ m −1 in Z direction; the probe can reach a radial resolution of 5 nm, and an axial resolution of 8 nm. The probe has a capability of decoupling the 3D tactility and it can be applied in the measurement of micro parts.