Cite
HARVARD Citation
Zhao, L. et al. (n.d.). A bossed diaphragm piezoresistive pressure sensor with a peninsula–island structure for the ultra-low-pressure range with high sensitivity. Measurement science & technology. p. . [Online].
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Zhao, L. et al. (n.d.). A bossed diaphragm piezoresistive pressure sensor with a peninsula–island structure for the ultra-low-pressure range with high sensitivity. Measurement science & technology. p. . [Online].