Effect of temperature, humidity, and crack initiation on properties of PZT micro-actuator. Issue 175 (12th October 2016)

• Record Type: Journal Article
• Authors: Bintachitt, Patamas; Suaprasert, Puntipa; Aungkavattana, Pavadee
• Is Part Of: Integrated ferroelectrics. Issue 175(2016)
• Page Start: 44
• Page End: 50
• Publication Date: 2016-10-12
• Subjects: PZT micro-actuator -- PZT degradation -- piezoelectric properties -- ferroelectrics -- hard disk drives; Ferroelectric devices -- Periodicals; Integrated circuits -- Periodicals; 537.244805
• DOI: 10.1080/10584587.2016.1200448
• Languages: English
• ISSNs: 1058-4587

Abstract

ABSTRACT: PZT has been utilized as micro-actuators to control high positioning accuracy and high-speed data access in high density Hard Disk Drives. The effect of temperature from 25°C to 260°C with humidity (80°C/80% RH) for 120 h on cracked-free and pre-cracked PZT micro-actuators was studied. Both dielectric constant (ϵr ) and piezoelectric coefficient (d31 ) of cracked-free and pre-cracked PZT subjected to humidity remained unchanged. After exposing the cracked-free PZT to temperature above 200°C, both ϵr and d31 were degraded while ϵr and d31 of pre-cracked PZT were degraded at temperature above 180°C and 140°C, respectively. In case of temperature with humidity, the ϵr and d31 were degraded at temperature above 200°C and d31 was dropped by 16% of cracked-free PZT. In case of pre-cracked PZT, both ϵr and d31 were degraded at temperature above 140°C with humidity conditions.